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Fabricated Quartzware

Heraeus Quarzglas supplies first-class quartzware into the entire value chain of the semiconductor industry like the silicon wafer manufacturers, original equipment manufacturers and chip manufacturing fabs. With a portfolio covering more than 3000 part numbers Heraeus Quarzglas is one of the market and technology leaders in this industry.
Within each mask level, quartzware is used in various processes, e.g. in deposition- or etch processes. Both batch processing (many wafers are processed at the same time) and single-wafer processing (wafers are treated individually) is used.
Quartz glass is also used in the photovoltaic valu chain. It is among the preferred materials used in the production of first-generation solar cells. It is used for processing 1. Generation solar cells and also in the 2. Generation production of solar panels.
Besides the semiconductor- and photovoltaic industry there are many other applications from the chemical industry or from the telecommunication industry.

for semiconductor batch applications

Quartzware for CVD, Epi, and more applications: Process tubes, liner, boats, pedestals, etc.

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for semiconductor single-wafer applications

Quartzware for dry etch processes, epitaxy, and more: profiled rings, distribution plates, domes, etc.

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for solar applications

Quartzware for the manufacturing of solar cells or solar panels: process tubes, boats, etc.

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for other applications

Quartzware for customer-specific use in various industrial processes

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